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Heated Ceramic Sensors to Detect Halogen Gases
A Low Temperature Co-fired Ceramic Application
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The design, construction and optimization of a low §power-high temperature heated ceramic sensor to §detect leaking of halogen gases in refrigeration §systems are presented. The manufacturing process was §done with microelectronic assembly and the Low §Temperature Co-fired Ceramic (LTCC) technology. Four §basic sensor materials were fabricated and tested §(Lithium Silicate, Sodium Silicate, Potassium §Silicate, and Calcium Silicate). The evaluation of §the sensor material, sensor size, operating §temperature, bias voltage, electrodes size, firing §temperature, gas flow, and sensor life was done. All §sensors respond to the gas showing stability and §reproducibility. The sensors were analyzed, modeled §and the response to the gas was divided in surface §diffusion and bulk diffusion within the sensor. The §theoretical results obtained by the modeling of the §sensor were in agreement with the experimental §values.
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